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Ethyl Acetate (EtOAc)

CH₃COOC₂H₅ · CAS 141-78-6

Electronic grade ethyl acetate for photoresist formulation and semiconductor organic coating. HPLC and pharma grades for TLC, preparative chromatography, pharmaceutical API extraction, and peptide synthesis.

Photoresist formulation co-solventorganic dielectric coating processthin-film display buffer layer solvent

Molecular Weight

88.11 g/mol

Boiling Point

77.1 °C

Density

0.902 g/mL

Molecular Formula

CH₃COOC₂H₅
CAS Number141-78-6
Boiling Point77.1 °C
Density0.902 g/mL
MW88.11 g/mol

Available Grades

G2G3G4G5PHARMAHPLC-PHPLC-GHPLCLC-MSANHYDROUSARGRINDUSTRIALFOOD

Analytical Specification

Analytical Specification Table

All values represent maximum allowable limits unless noted ≥. A lot-specific Certificate of Analysis (CoA) with ICP-MS, LPC, and GC data is issued for every shipment. Full data packages available on request.

ParameterTest MethodUnitG4HPLCAR
Assay (GC)GC-FID%≥99.99≥99.8≥99.5
Water Content (KF)Karl Fischerppm≤20≤50≤500
Acidity (as HAc)Titrationppm≤2≤5≤5
EthanolGC-FIDppm≤50≤200≤500
Residue on EvaporationGravimetricppm≤2≤2≤5

★ G5 = SEMI C1 Tier D (6N grade). All metal values by ICP-MS. Particle counts by in-line LPC during ISO Class 3 fill. CoA available on request.

Grade Comparison

G1 → G5 Purity Scale

Select the grade that matches your process node and contamination budget. Every grade is available from PureTech with full lot CoA and ICP-MS data.

Electronic Grade Purity Comparison — SEMI C1 StandardG1 → G5
GradePurity (GC)Metals (ICP)ParticlesWater (KF)Process Node
G1
≥99.0%
≤50 ppb≤500/mL≤500 ppmPCB / Display / Solar
G2
≥99.9%
≤10 ppb≤100/mL≤50 ppm≥180nm Mature Node
G3
≥99.99%
≤2 ppb≤20/mL≤20 ppm45–180nm
G4
≥99.999%
≤0.5 ppb≤10/mL≤10 ppm7–45nm
G5
≥99.9999%
<0.1 ppb≤5/mL≤5 ppm<7nm / EUV / Marangoni

All grades tested by ICP-MS (28 elements), in-line LPC (ISO Class 3 fill), and Karl Fischer titration. G5 = SEMI C1 Tier D. Full CoA per lot.  Request CoA template →

Application Areas

Where Ethyl Acetate Is Used

Semiconductor Process

  • Photoresist formulation co-solvent
  • organic dielectric coating process
  • thin-film display buffer layer solvent

Laboratory & Analytical

  • TLC & column chromatography (normal phase)
  • pharmaceutical API extraction
  • Fmoc peptide coupling solvent
  • flash chromatography

Industrial & Other

  • Artificial fruit flavoring
  • nail polish formulation
  • printing inks
  • adhesives & sealants

Packaging & Supply

Available Container Formats

500 mL
2.5 L
5 L
25 L
200 L

Get Started

Request a Sample or
Technical Quote

Our application engineers respond with full CoA data, ICP-MS reports, and supply chain details within one business day.