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Isopropyl Acetate (iPrOAc)

CH₃COOCH(CH₃)₂ · CAS 108-21-4

Isopropyl acetate for specialty EUV underlayer and spin-on hard mask (SOH) formulations where rapid evaporation and low residue are required. Intermediate boiling point (88.6°C) between EtOAc and n-PrOAc enables precise film thickness control.

EUV underlayer spin-on hard mask (SOH) solventSpecialty negative photoresist formulationOrganic thin-film research solvent

Molecular Weight

102.13 g/mol

Boiling Point

88.6 °C

Density

0.874 g/mL

Molecular Formula

CH₃COOCH(CH₃)₂
CAS Number108-21-4
Boiling Point88.6 °C
Density0.874 g/mL
MW102.13 g/mol

Available Grades

G2G3G4PHARMAARINDUSTRIAL

Analytical Specification

Analytical Specification Table

All values represent maximum allowable limits unless noted ≥. A lot-specific Certificate of Analysis (CoA) with ICP-MS, LPC, and GC data is issued for every shipment. Full data packages available on request.

ParameterTest MethodUnitG4AR
Assay (GC)GC-FID%≥99.99≥99.5
Water (KF)Karl Fischerppm≤30≤500
Residue on Evap.Gravimetricppm≤2≤5

★ G5 = SEMI C1 Tier D (6N grade). All metal values by ICP-MS. Particle counts by in-line LPC during ISO Class 3 fill. CoA available on request.

Grade Comparison

G1 → G5 Purity Scale

Select the grade that matches your process node and contamination budget. Every grade is available from PureTech with full lot CoA and ICP-MS data.

Electronic Grade Purity Comparison — SEMI C1 StandardG1 → G5
GradePurity (GC)Metals (ICP)ParticlesWater (KF)Process Node
G1
≥99.0%
≤50 ppb≤500/mL≤500 ppmPCB / Display / Solar
G2
≥99.9%
≤10 ppb≤100/mL≤50 ppm≥180nm Mature Node
G3
≥99.99%
≤2 ppb≤20/mL≤20 ppm45–180nm
G4
≥99.999%
≤0.5 ppb≤10/mL≤10 ppm7–45nm
G5
≥99.9999%
<0.1 ppb≤5/mL≤5 ppm<7nm / EUV / Marangoni

All grades tested by ICP-MS (28 elements), in-line LPC (ISO Class 3 fill), and Karl Fischer titration. G5 = SEMI C1 Tier D. Full CoA per lot.  Request CoA template →

Application Areas

Where Isopropyl Acetate Is Used

Semiconductor Process

  • EUV underlayer spin-on hard mask (SOH) solvent
  • Specialty negative photoresist formulation
  • Organic thin-film research solvent

Laboratory & Analytical

  • Extraction solvent
  • chromatography

Industrial & Other

  • Flavoring agent
  • printing inks
  • adhesives

Packaging & Supply

Available Container Formats

5 L
20 L
200 L

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Our application engineers respond with full CoA data, ICP-MS reports, and supply chain details within one business day.