Isopropyl Acetate (iPrOAc)
CH₃COOCH(CH₃)₂ · CAS 108-21-4
Isopropyl acetate for specialty EUV underlayer and spin-on hard mask (SOH) formulations where rapid evaporation and low residue are required. Intermediate boiling point (88.6°C) between EtOAc and n-PrOAc enables precise film thickness control.
Molecular Weight
102.13 g/mol
Boiling Point
88.6 °C
Density
0.874 g/mL
Molecular Formula
Available Grades
Analytical Specification
Analytical Specification Table
All values represent maximum allowable limits unless noted ≥. A lot-specific Certificate of Analysis (CoA) with ICP-MS, LPC, and GC data is issued for every shipment. Full data packages available on request.
| Parameter | Test Method | Unit | G4 | AR |
|---|---|---|---|---|
| Assay (GC) | GC-FID | % | ≥99.99 | ≥99.5 |
| Water (KF) | Karl Fischer | ppm | ≤30 | ≤500 |
| Residue on Evap. | Gravimetric | ppm | ≤2 | ≤5 |
★ G5 = SEMI C1 Tier D (6N grade). All metal values by ICP-MS. Particle counts by in-line LPC during ISO Class 3 fill. CoA available on request.
Grade Comparison
G1 → G5 Purity Scale
Select the grade that matches your process node and contamination budget. Every grade is available from PureTech with full lot CoA and ICP-MS data.
All grades tested by ICP-MS (28 elements), in-line LPC (ISO Class 3 fill), and Karl Fischer titration. G5 = SEMI C1 Tier D. Full CoA per lot. Request CoA template →
Application Areas
Where Isopropyl Acetate Is Used
Semiconductor Process
- EUV underlayer spin-on hard mask (SOH) solvent
- Specialty negative photoresist formulation
- Organic thin-film research solvent
Laboratory & Analytical
- Extraction solvent
- chromatography
Industrial & Other
- Flavoring agent
- printing inks
- adhesives
Packaging & Supply
Available Container Formats
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