High-purity options
Compare listed grades and current product-specific limits.
CH₃COOCH(CH₃)₂ · CAS 108-21-4
Isopropyl Acetate (iPrOAc) is often shortlisted for euv underlayer spin-on hard mask (soh) solvent. In coating and lithography work, purity is only part of the decision: evaporation behaviour, water, acidity, residue and compatibility with the resist system should be reviewed together.
A common starting point
EUV underlayer spin-on hard mask (SOH) solvent
Molecular weight
102.13 g/mol
Boiling point
88.6 °C
Density
0.874 g/mL

Product identity
Product overview
Isopropyl Acetate is considered for processes that need a consistent material, controlled critical impurities and a supply format that can move from qualification to routine use. The grade should be selected against the actual process—not a generic purity claim.
Compare listed grades and current product-specific limits.
Focus testing on the impurities and performance risks that matter.
Align sample, production pack, forecast and document route early.

Before you specify
A higher grade is not automatically the better choice. The useful option fits the process, analytical method, packaging route and qualification plan without adding controls the application does not need.
Which resist, polymer or coating formulation is in use?
What evaporation, film-uniformity or edge-bead behaviour needs to be preserved?
Which water, acidity, peroxide and residue limits are already qualified?
What container, filtration and point-of-use connection are required?
Specification data
This table is an indicative product overview for initial screening. Confirm the current controlled specification, test methods, reporting limits and available lot documentation before qualification or purchase.
| Parameter | Test method | Unit | G4 | AR |
|---|---|---|---|---|
| Assay (GC) | GC-FID | % | ≥99.99 | ≥99.5 |
| Water (KF) | Karl Fischer | ppm | ≤30 | ≤500 |
| Residue on Evap. | Gravimetric | ppm | ≤2 | ≤5 |
Website values do not replace a signed sales specification. The agreed specification and lot-specific Certificate of Analysis govern supplied material.
Electronic grade context
SEMI C1 describes liquid-chemical grades and analytical procedures. A grade name helps organise a discussion; your process specification still decides which limits and methods are acceptable.
All grades tested by ICP-MS (28 elements), in-line LPC (ISO Class 3 fill), and Karl Fischer titration. G5 = SEMI C1 Tier D. Full CoA per lot. Request CoA template →
Where this product is used
These examples help with discovery. They are not claims of universal suitability; material compatibility, process performance and the controlled specification still need review.

Representative application cases
These are illustrative composite qualification scenarios, not named customer claims. Exact methods, limits and acceptance decisions belong to the customer’s controlled process.
A contamination-sensitive production team compares Isopropyl Acetate (iPrOAc) with its incumbent material using the agreed water, metals, organic-impurity, residue and particle controls.
Evidence route
Supplier CoA and specification data are evaluated alongside a representative process trial and incoming-control plan.
A site qualifies Isopropyl Acetate (iPrOAc) for supply resilience without changing its approved process or dispensing route.
Evidence route
The review connects sample identity, production-pack compatibility, analytical comparison and documented change communication.

Manufacturing advantage
The supply route for Isopropyl Acetate connects incoming-material review, product-specific treatment, controlled transfer, testing, filling and lot documentation. Exact equipment and controls depend on the qualified product and grade.
Product-specific separation or treatment route.
Compatible filtration and controlled transfer.
Release against the agreed specification.
Pack, closure and lot identification review.
Quality assurance & documentation
Documents are matched to the supplied product, grade, lot and destination. The links below request the current controlled version; they are not static files with uncertain revision status.
Lot-specific result or conformance format.
Request current file →Product- and market-specific hazard communication.
Request current file →Connection between production, testing, pack and lot.
Request current file →Agreed limits, units and referenced methods.
Request current file →
Packaging options
Availability varies by grade and destination. Confirm container material, closure, headspace, connection, minimum order, dangerous-goods route and qualification-lot needs.
For evaluation, method work and lower-volume routine use.
For regular production consumption and controlled dispensing.
For higher-volume programmes after site, grade and logistics review.
Technical resources
Use application notes for context, then confirm current product documents before qualification.
Start a product review
Send the application, current specification, critical limits, pack, destination and forecast so the response can be technically useful.