Ammonium Hydroxide (Electronic Grade)
NH₄OH · CAS 1336-21-6
Ultra-high purity ammonium hydroxide is the key alkaline component of RCA SC-1 (APM: ammonium-peroxide mixture), the industry standard solution for particle and organic contaminant removal from silicon wafer surfaces. G5 grade with <0.1 ppb total metals is specified for sub-5nm FEOL cleaning.
Molecular Weight
35.05 g/mol
Boiling Point
38 °C (28%)
Density
0.90 g/mL (28–30%)
Molecular Formula
Available Grades
Analytical Specification
Analytical Specification Table
All values represent maximum allowable limits unless noted ≥. A lot-specific Certificate of Analysis (CoA) with ICP-MS, LPC, and GC data is issued for every shipment. Full data packages available on request.
| Parameter | Test Method | Unit | G4 | G5 ★ |
|---|---|---|---|---|
| Assay (NH₃) | Titration | % | 28.0–30.0 | 28.0–30.0 |
| Total Metals | ICP-MS | ppb ea. | ≤0.5 | <0.1 |
| Fe (Iron) | ICP-MS | ppb | ≤0.2 | <0.05 |
| Cu (Copper) | ICP-MS | ppb | ≤0.1 | <0.05 |
| Cl⁻ (Chloride) | IC | ppb | ≤50 | ≤10 |
| Particles ≥0.5μm | LPC | ct/mL | ≤10 | ≤5 |
★ G5 = SEMI C1 Tier D (6N grade). All metal values by ICP-MS. Particle counts by in-line LPC during ISO Class 3 fill. CoA available on request.
Grade Comparison
G1 → G5 Purity Scale
Select the grade that matches your process node and contamination budget. Every grade is available from PureTech with full lot CoA and ICP-MS data.
All grades tested by ICP-MS (28 elements), in-line LPC (ISO Class 3 fill), and Karl Fischer titration. G5 = SEMI C1 Tier D. Full CoA per lot. Request CoA template →
Application Areas
Where Ammonium Hydroxide Is Used
Semiconductor Process
- RCA SC-1 (APM) particle & organic removal
- Dilute APM (1:1:100) advanced node cleaning
- Post-CMP alkaline cleaning bath
- Photoresist strip (alkaline)
- Copper interconnect surface conditioning
- Gate oxide pre-clean (with H₂O₂)
Laboratory & Analytical
- pH adjustment to alkaline range
- complexometric titrations
- qualitative analysis
Industrial & Other
- PCB cleaning
- refrigerant R-717 (industrial grade)
- fertilizer (industrial)
Packaging & Supply
Available Container Formats
Related Products
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