Hydrogen Peroxide (Electronic Grade)
H₂O₂ · CAS 7722-84-1
The most versatile oxidant in semiconductor wet processing. Electronic grade H₂O₂ (30% and 50% concentrations) is essential for RCA SC-1 (APM: NH₄OH/H₂O₂/H₂O), RCA SC-2 (HPM: HCl/H₂O₂/H₂O), piranha solution (SPM: H₂SO₄/H₂O₂), and as the primary oxidizer in copper CMP slurry formulations.
Molecular Weight
34.01 g/mol
Boiling Point
150.2 °C
Density
1.11 g/mL (30%)
Molecular Formula
Available Grades
Analytical Specification
Analytical Specification Table
All values represent maximum allowable limits unless noted ≥. A lot-specific Certificate of Analysis (CoA) with ICP-MS, LPC, and GC data is issued for every shipment. Full data packages available on request.
| Parameter | Test Method | Unit | G4 | G5 ★ |
|---|---|---|---|---|
| Assay (H₂O₂) | Titration | % | 29.0–32.0 | 29.0–32.0 |
| Total Metals | ICP-MS | ppb ea. | ≤0.5 | <0.1 |
| Fe (Iron) | ICP-MS | ppb | ≤0.2 | <0.05 |
| Na (Sodium) | ICP-MS | ppb | ≤0.3 | <0.1 |
| Total Organic C | TOC | ppm | ≤1 | ≤0.5 |
| Particles ≥0.5μm | LPC | ct/mL | ≤10 | ≤5 |
★ G5 = SEMI C1 Tier D (6N grade). All metal values by ICP-MS. Particle counts by in-line LPC during ISO Class 3 fill. CoA available on request.
Grade Comparison
G1 → G5 Purity Scale
Select the grade that matches your process node and contamination budget. Every grade is available from PureTech with full lot CoA and ICP-MS data.
All grades tested by ICP-MS (28 elements), in-line LPC (ISO Class 3 fill), and Karl Fischer titration. G5 = SEMI C1 Tier D. Full CoA per lot. Request CoA template →
Application Areas
Where Hydrogen Peroxide Is Used
Semiconductor Process
- RCA SC-1 (APM) particle & organic removal (with NH₄OH)
- RCA SC-2 (HPM) metal ion removal (with HCl)
- Piranha solution (SPM) photoresist & organic strip (with H₂SO₄)
- Cu / W CMP slurry oxidizer
- Silicon native oxide re-growth after HF strip
- Ozone-compatible oxidant for FEOL clean
Laboratory & Analytical
- Oxidative digestion
- bleaching agent
- disinfection
Industrial & Other
- PCB etch oxidizer
- textile bleaching
- paper pulp bleaching
- wastewater treatment
Battery & Energy Storage
Packaging & Supply
Available Container Formats
Related Products
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