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Electronic G2Electronic G3Electronic G4Electronic G5Photoresist & Lithography Solvents

Propylene Glycol Monomethyl Ether (PGME)

CH₃OCH₂CH(OH)CH₃ · CAS 107-98-2

Electronic grade PGME is the industry-leading edge-bead removal (EBR) solvent and photoresist formulation co-solvent. Its excellent dissolution power for positive chemically-amplified resists (CAR), low surface tension, and controlled evaporation rate make it essential for ArF, KrF, and EUV lithography patterning.

Edge bead removal (EBR) in spin-coating processArF / KrF / EUV photoresist formulation co-solventAnti-reflective coating (ARC) formulation solventBottom anti-reflective coating (BARC) solventEUV metal oxide resist (MOR) developerThick film photoresist dilutionPolyimide (PI) precursor solution solvent

Molecular Weight

90.12 g/mol

Boiling Point

120 °C

Density

0.921 g/mL

Molecular Formula

CH₃OCH₂CH(OH)CH₃
SEMI C12
CAS Number107-98-2
Boiling Point120 °C
Density0.921 g/mL
MW90.12 g/mol

Available Grades

G2G3G4G5PHARMAARINDUSTRIAL

Analytical Specification

Analytical Specification Table

All values represent maximum allowable limits unless noted ≥. A lot-specific Certificate of Analysis (CoA) with ICP-MS, LPC, and GC data is issued for every shipment. Full data packages available on request.

ParameterTest MethodUnitG4G5 ★AR
Assay (GC)GC-FID%≥99.99≥99.999≥99.5
Water Content (KF)Karl Fischerppm≤30≤10≤2000
Total Metals (ICP-MS)ICP-MSppb ea.≤0.5<0.1
Propylene GlycolGC-FIDppm≤50≤20≤200
Methoxypropanol isomersGC-FIDppm≤100≤50
Acidity (as HAc)Titrationppm≤2≤1≤10
Residue on EvaporationGravimetricppm≤2≤0.5≤10
Color (APHA)ASTM D1209Hazen≤5≤5≤10
Peroxide (as H₂O₂)Iodometricppm≤1≤0.5≤5

★ G5 = SEMI C1 Tier D (6N grade). All metal values by ICP-MS. Particle counts by in-line LPC during ISO Class 3 fill. CoA available on request.

Grade Comparison

G1 → G5 Purity Scale

Select the grade that matches your process node and contamination budget. Every grade is available from PureTech with full lot CoA and ICP-MS data.

Electronic Grade Purity Comparison — SEMI C1 StandardG1 → G5
GradePurity (GC)Metals (ICP)ParticlesWater (KF)Process Node
G1
≥99.0%
≤50 ppb≤500/mL≤500 ppmPCB / Display / Solar
G2
≥99.9%
≤10 ppb≤100/mL≤50 ppm≥180nm Mature Node
G3
≥99.99%
≤2 ppb≤20/mL≤20 ppm45–180nm
G4
≥99.999%
≤0.5 ppb≤10/mL≤10 ppm7–45nm
G5
≥99.9999%
<0.1 ppb≤5/mL≤5 ppm<7nm / EUV / Marangoni

All grades tested by ICP-MS (28 elements), in-line LPC (ISO Class 3 fill), and Karl Fischer titration. G5 = SEMI C1 Tier D. Full CoA per lot.  Request CoA template →

Application Areas

Where Propylene Glycol Monomethyl Ether Is Used

Semiconductor Process

  • Edge bead removal (EBR) in spin-coating process
  • ArF / KrF / EUV photoresist formulation co-solvent
  • Anti-reflective coating (ARC) formulation solvent
  • Bottom anti-reflective coating (BARC) solvent
  • EUV metal oxide resist (MOR) developer
  • Thick film photoresist dilution
  • Polyimide (PI) precursor solution solvent
  • OLED pixel definition layer (PDL) coating solvent

Laboratory & Analytical

  • Polymer coating research
  • UV-curable ink formulation
  • surface energy studies

Industrial & Other

  • Inkjet printing ink formulation
  • industrial coating manufacturing
  • leather finishing coating

Packaging & Supply

Available Container Formats

1 L
5 L
20 L
200 L
IBC

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Our application engineers respond with full CoA data, ICP-MS reports, and supply chain details within one business day.