High-purity options
Compare listed grades and current product-specific limits.
Electronic G2Electronic G3Electronic G4Electronic Grade Process Acids
Phosphoric Acid (Electronic Grade)
H₃PO₄ · CAS 7664-38-2
Phosphoric Acid (Electronic Grade) is evaluated for hot phosphoric acid (hpa) si₃n₄ selective etch and other controlled wet processes. Concentration, impurity profile, container compatibility and the delivery path to point of use should be agreed before qualification.
A common starting point
Hot phosphoric acid (HPA) Si₃N₄ selective etch
Molecular weight
98.00 g/mol
Boiling point
158 °C (85%)
Density
1.685 g/mL (85%)
✓High-purity options✓Batch documentation✓Flexible packaging review
Product identity
- CAS number
- 7664-38-2
- Formula
- H₃PO₄
- Boiling point
- 158 °C (85%)
- Density
- 1.685 g/mL (85%)
Product overview
A product route built around the application
Phosphoric Acid is considered for processes that need a consistent material, controlled critical impurities and a supply format that can move from qualification to routine use. The grade should be selected against the actual process—not a generic purity claim.
Controlled attributes
Focus testing on the impurities and performance risks that matter.
Supply planning
Align sample, production pack, forecast and document route early.
Before you specify
A better enquiry starts with four answers
A higher grade is not automatically the better choice. The useful option fits the process, analytical method, packaging route and qualification plan without adding controls the application does not need.
01
Where in the process does the chemical contact the wafer, substrate or tool?
02
Which metals, particles, anions, water or residue limits are truly critical?
03
What is the current qualified specification or incumbent baseline?
04
How will the product be sampled, connected, filtered and stored on site?
Specification data
Compare the listed grade columns
This table is an indicative product overview for initial screening. Confirm the current controlled specification, test methods, reporting limits and available lot documentation before qualification or purchase.
| Parameter | Test method | Unit | G4 |
|---|---|---|---|
| Assay | Titration | % | 84.5–85.5 |
| Total Metals | ICP-MS | ppb ea. | ≤0.5 |
| Fe (Iron) | ICP-MS | ppb | ≤0.2 |
| Cl⁻ (Chloride) | IC | ppb | ≤50 |
| SO₄²⁻ (Sulfate) | IC | ppb | ≤100 |
Website values do not replace a signed sales specification. The agreed specification and lot-specific Certificate of Analysis govern supplied material.
Electronic grade context
Use the grade scale as a first comparison
SEMI C1 describes liquid-chemical grades and analytical procedures. A grade name helps organise a discussion; your process specification still decides which limits and methods are acceptable.
Electronic Grade Purity Comparison — SEMI C1 StandardG1 → G5
GradePurity (GC)Metals (ICP)ParticlesWater (KF)Process Node
G2
≥99.9%
G3
≥99.99%
G4
≥99.999%
G5
≥99.9999%
All grades tested by ICP-MS (28 elements), in-line LPC (ISO Class 3 fill), and Karl Fischer titration. G5 = SEMI C1 Tier D. Full CoA per lot. Request CoA template →
Where this product is used
Application routes for Phosphoric Acid
These examples help with discovery. They are not claims of universal suitability; material compatibility, process performance and the controlled specification still need review.
Semiconductor & electronics
- Hot phosphoric acid (HPA) Si₃N₄ selective etch
- STI nitride removal etch
- DRAM capacitor nitride etch
- Self-aligned contact (SAC) nitride etch
- Post-CMP Si₃N₄ clean
Battery & energy storage
- Li-ion battery cathode precursor (LiFePO₄ synthesis)
Laboratory & analytical
- Buffer solution preparation
- mobile phase modifier (ion pair HPLC)
Industrial & other
- PCB copper pre-treatment
- fertilizer production
- food acidulant (E338)
Representative application cases
A practical evidence route for Phosphoric Acid
These are illustrative composite qualification scenarios, not named customer claims. Exact methods, limits and acceptance decisions belong to the customer’s controlled process.
Method-blank investigation
An analytical laboratory checks whether Phosphoric Acid (Electronic Grade) contributes to variability near its working reporting range.
Evidence route
The candidate lot is run through the laboratory’s actual preparation method; supplier data supports but does not replace local blank trending.
Multi-site reagent alignment
European and US laboratories compare Phosphoric Acid (Electronic Grade) for a shared analytical workflow.
Evidence route
Pack, sampling, storage, element panel and acceptance checks are aligned, followed by verification at each site.
Manufacturing advantage
A controlled route from purification to final filling
The supply route for Phosphoric Acid connects incoming-material review, product-specific treatment, controlled transfer, testing, filling and lot documentation. Exact equipment and controls depend on the qualified product and grade.
Purification
Product-specific separation or treatment route.
Filtration
Compatible filtration and controlled transfer.
Testing
Release against the agreed specification.
Clean filling
Pack, closure and lot identification review.
Quality assurance & documentation
Evidence your quality team can review
Documents are matched to the supplied product, grade, lot and destination. The links below request the current controlled version; they are not static files with uncertain revision status.
Certificate of Analysis
Lot-specific result or conformance format.
Request current file →Safety Data Sheet
Product- and market-specific hazard communication.
Request current file →Batch traceability
Connection between production, testing, pack and lot.
Request current file →Specification sheet
Agreed limits, units and referenced methods.
Request current file →Packaging options
Choose the pack with the handling route in mind
Availability varies by grade and destination. Confirm container material, closure, headspace, connection, minimum order, dangerous-goods route and qualification-lot needs.
Qualification & laboratory packs
For evaluation, method work and lower-volume routine use.
1 L5 L
Drums & production packs
For regular production consumption and controlled dispensing.
20 L200 L
IBC & bulk routes
For higher-volume programmes after site, grade and logistics review.
Confirm by grade
Technical resources
Continue the technical review
Use application notes for context, then confirm current product documents before qualification.
Start a product review
Need a reliable supply route for Phosphoric Acid?
Send the application, current specification, critical limits, pack, destination and forecast so the response can be technically useful.