High-purity options
Compare listed grades and current product-specific limits.
Electronic G2Electronic G3Electronic G4Electronic G5Photoresist & Lithography Solvents
Propylene Glycol Monomethyl Ether Acetate (PGMEA)
CH₃COOCH(CH₃)CH₂OCH₃ · CAS 108-65-6
Propylene Glycol Monomethyl Ether Acetate (PGMEA) is often shortlisted for arf immersion photoresist primary solvent (193i). In coating and lithography work, purity is only part of the decision: evaporation behaviour, water, acidity, residue and compatibility with the resist system should be reviewed together.
A common starting point
ArF immersion photoresist primary solvent (193i)
Molecular weight
132.16 g/mol
Boiling point
146 °C
Density
0.965 g/mL
✓High-purity options✓Batch documentation✓Flexible packaging review
Product identity
- CAS number
- 108-65-6
- Formula
- CH₃COOCH(CH₃)CH₂OCH₃
- Boiling point
- 146 °C
- Density
- 0.965 g/mL
Product overview
A product route built around the application
Propylene Glycol Monomethyl Ether Acetate is considered for processes that need a consistent material, controlled critical impurities and a supply format that can move from qualification to routine use. The grade should be selected against the actual process—not a generic purity claim.
Controlled attributes
Focus testing on the impurities and performance risks that matter.
Supply planning
Align sample, production pack, forecast and document route early.
Before you specify
A better enquiry starts with four answers
A higher grade is not automatically the better choice. The useful option fits the process, analytical method, packaging route and qualification plan without adding controls the application does not need.
01
Which resist, polymer or coating formulation is in use?
02
What evaporation, film-uniformity or edge-bead behaviour needs to be preserved?
03
Which water, acidity, peroxide and residue limits are already qualified?
04
What container, filtration and point-of-use connection are required?
Specification data
Compare the listed grade columns
This table is an indicative product overview for initial screening. Confirm the current controlled specification, test methods, reporting limits and available lot documentation before qualification or purchase.
| Parameter | Test method | Unit | G4 | G5 | AR |
|---|---|---|---|---|---|
| Assay (GC) | GC-FID | % | ≥99.99 | ≥99.999 | ≥99.5 |
| Water Content (KF) | Karl Fischer | ppm | ≤30 | ≤10 | ≤2000 |
| Total Metals (ICP-MS) | ICP-MS | ppb ea. | ≤0.5 | <0.1 | — |
| Acetic Acid | GC-FID | ppm | ≤20 | ≤5 | ≤50 |
| 1-Methoxy-2-Propanol (PGME) | GC-FID | ppm | ≤50 | ≤20 | ≤100 |
| Propylene Glycol Diacetate | GC-FID | ppm | ≤30 | ≤10 | — |
| Acidity (as HAc) | Titration | ppm | ≤10 | ≤5 | ≤20 |
| Residue on Evaporation | Gravimetric | ppm | ≤2 | ≤0.5 | ≤10 |
| Color (APHA) | ASTM D1209 | Hazen | ≤5 | ≤5 | ≤10 |
| Peroxide (as H₂O₂) | Iodometric | ppm | ≤1 | ≤0.5 | ≤5 |
Website values do not replace a signed sales specification. The agreed specification and lot-specific Certificate of Analysis govern supplied material.
Electronic grade context
Use the grade scale as a first comparison
SEMI C1 describes liquid-chemical grades and analytical procedures. A grade name helps organise a discussion; your process specification still decides which limits and methods are acceptable.
Electronic Grade Purity Comparison — SEMI C1 StandardG1 → G5
GradePurity (GC)Metals (ICP)ParticlesWater (KF)Process Node
G2
≥99.9%
G3
≥99.99%
G4
≥99.999%
G5
≥99.9999%
All grades tested by ICP-MS (28 elements), in-line LPC (ISO Class 3 fill), and Karl Fischer titration. G5 = SEMI C1 Tier D. Full CoA per lot. Request CoA template →
Where this product is used
Application routes for Propylene Glycol Monomethyl Ether Acetate
These examples help with discovery. They are not claims of universal suitability; material compatibility, process performance and the controlled specification still need review.
Semiconductor & electronics
- ArF immersion photoresist primary solvent (193i)
- EUV chemically-amplified resist (CAR) formulation
- EUV metal oxide resist (MOR) formulation solvent
- KrF / I-line positive photoresist primary solvent
- Spin-on carbon (SOC) hard-mask dielectric solvent
- Spin-on glass (SOG) intermetal dielectric solvent
- Negative-tone developer (NTD) solvent in double patterning
- OLED organic EL layer inkjet printing solvent
- Polyimide (PI) precursor coating for HDI packaging
Laboratory & analytical
- Polymer thin-film coating research
- photocatalyst thin-film deposition
- organic synthesis solvent
Industrial & other
- Flat panel display (AMOLED/TFT-LCD) lithography
- printed electronics R2R coating
- gravure printing inks
Representative application cases
A practical evidence route for Propylene Glycol Monomethyl Ether Acetate
These are illustrative composite qualification scenarios, not named customer claims. Exact methods, limits and acceptance decisions belong to the customer’s controlled process.
European process qualification
A contamination-sensitive production team compares Propylene Glycol Monomethyl Ether Acetate (PGMEA) with its incumbent material using the agreed water, metals, organic-impurity, residue and particle controls.
Evidence route
Supplier CoA and specification data are evaluated alongside a representative process trial and incoming-control plan.
North American second-source review
A site qualifies Propylene Glycol Monomethyl Ether Acetate (PGMEA) for supply resilience without changing its approved process or dispensing route.
Evidence route
The review connects sample identity, production-pack compatibility, analytical comparison and documented change communication.
Manufacturing advantage
A controlled route from purification to final filling
The supply route for Propylene Glycol Monomethyl Ether Acetate connects incoming-material review, product-specific treatment, controlled transfer, testing, filling and lot documentation. Exact equipment and controls depend on the qualified product and grade.
Purification
Product-specific separation or treatment route.
Filtration
Compatible filtration and controlled transfer.
Testing
Release against the agreed specification.
Clean filling
Pack, closure and lot identification review.
Quality assurance & documentation
Evidence your quality team can review
Documents are matched to the supplied product, grade, lot and destination. The links below request the current controlled version; they are not static files with uncertain revision status.
Certificate of Analysis
Lot-specific result or conformance format.
Request current file →Safety Data Sheet
Product- and market-specific hazard communication.
Request current file →Batch traceability
Connection between production, testing, pack and lot.
Request current file →Specification sheet
Agreed limits, units and referenced methods.
Request current file →
Packaging options
Choose the pack with the handling route in mind
Availability varies by grade and destination. Confirm container material, closure, headspace, connection, minimum order, dangerous-goods route and qualification-lot needs.
Qualification & laboratory packs
For evaluation, method work and lower-volume routine use.
1 L5 L
Drums & production packs
For regular production consumption and controlled dispensing.
20 L200 L
IBC & bulk routes
For higher-volume programmes after site, grade and logistics review.
IBC
Technical resources
Continue the technical review
Use application notes for context, then confirm current product documents before qualification.
Start a product review
Need a reliable supply route for Propylene Glycol Monomethyl Ether Acetate?
Send the application, current specification, critical limits, pack, destination and forecast so the response can be technically useful.