Butyl Acetate (n-BuOAc)
CH₃COOC₄H₉ · CAS 123-86-4
Electronic grade butyl acetate is the standard photoresist developer thinner and key solvent in negative-tone development (NTD) for EUV double/quadruple patterning. Its moderate evaporation rate produces excellent photoresist film quality in KrF and EUV lithography.
Molecular Weight
116.16 g/mol
Boiling Point
126.1 °C
Density
0.882 g/mL
Molecular Formula
Available Grades
Analytical Specification
Analytical Specification Table
All values represent maximum allowable limits unless noted ≥. A lot-specific Certificate of Analysis (CoA) with ICP-MS, LPC, and GC data is issued for every shipment. Full data packages available on request.
| Parameter | Test Method | Unit | G4 | HPLC | AR |
|---|---|---|---|---|---|
| Assay (GC) | GC-FID | % | ≥99.99 | ≥99.8 | ≥99.5 |
| Water Content (KF) | Karl Fischer | ppm | ≤30 | ≤50 | ≤500 |
| Acidity (as HAc) | Titration | ppm | ≤2 | ≤5 | ≤5 |
| n-Butanol | GC-FID | ppm | ≤50 | ≤100 | ≤200 |
| Residue on Evaporation | Gravimetric | ppm | ≤2 | ≤2 | ≤5 |
★ G5 = SEMI C1 Tier D (6N grade). All metal values by ICP-MS. Particle counts by in-line LPC during ISO Class 3 fill. CoA available on request.
Grade Comparison
G1 → G5 Purity Scale
Select the grade that matches your process node and contamination budget. Every grade is available from PureTech with full lot CoA and ICP-MS data.
All grades tested by ICP-MS (28 elements), in-line LPC (ISO Class 3 fill), and Karl Fischer titration. G5 = SEMI C1 Tier D. Full CoA per lot. Request CoA template →
Application Areas
Where Butyl Acetate Is Used
Semiconductor Process
- Negative-tone development (NTD) primary solvent — EUV double patterning
- KrF photoresist developer thinner
- Organic thin-film spin-coating (controlled evaporation)
- Contact hole / via patterning EUV process
Laboratory & Analytical
- Normal-phase chromatography (TLC, column)
- natural product extraction
- GC reference standard solvent
Industrial & Other
- Nail polish & nail care formulation
- architectural paints & varnishes
- food banana/pear flavor
- adhesives & sealants
Packaging & Supply
Available Container Formats
Get Started
Request a Sample or
Technical Quote
Our application engineers respond with full CoA data, ICP-MS reports, and supply chain details within one business day.