Sulfuric Acid (Electronic Grade)
H₂SO₄ · CAS 7664-93-9
Ultra-high purity sulfuric acid for piranha solution (SPM: H₂SO₄/H₂O₂), pre-diffusion organic clean, and photoresist strip. The most consumed wet chemical by volume in semiconductor fabs, used at every node from mature 180nm to sub-3nm.
Molecular Weight
98.07 g/mol
Boiling Point
337 °C
Density
1.840 g/mL
Molecular Formula
Available Grades
Analytical Specification
Analytical Specification Table
All values represent maximum allowable limits unless noted ≥. A lot-specific Certificate of Analysis (CoA) with ICP-MS, LPC, and GC data is issued for every shipment. Full data packages available on request.
| Parameter | Test Method | Unit | G4 | G5 ★ |
|---|---|---|---|---|
| Assay | Titration | % | 96.0–98.0 | 96.0–98.0 |
| Total Metals | ICP-MS | ppb ea. | ≤0.5 | <0.1 |
| Cl⁻ (Chloride) | IC | ppb | ≤50 | ≤10 |
| Fe (Iron) | ICP-MS | ppb | ≤0.2 | <0.05 |
| NH₄⁺ | IC | ppb | ≤100 | ≤20 |
| Residue on Evap. | Gravimetric | ppm | ≤5 | ≤2 |
★ G5 = SEMI C1 Tier D (6N grade). All metal values by ICP-MS. Particle counts by in-line LPC during ISO Class 3 fill. CoA available on request.
Grade Comparison
G1 → G5 Purity Scale
Select the grade that matches your process node and contamination budget. Every grade is available from PureTech with full lot CoA and ICP-MS data.
All grades tested by ICP-MS (28 elements), in-line LPC (ISO Class 3 fill), and Karl Fischer titration. G5 = SEMI C1 Tier D. Full CoA per lot. Request CoA template →
Application Areas
Where Sulfuric Acid Is Used
Semiconductor Process
- Piranha solution (SPM) photoresist & organic strip
- Pre-diffusion/implant wafer clean
- Oxide regrowth control pre-clean
- Gate oxide preparation clean
- Post-implant photoresist strip (hot SPM)
- Al/Ti metal etch (dilute H₂SO₄)
Laboratory & Analytical
- Ion chromatography eluent
- digestion of geological samples
- titration standard
Industrial & Other
- PCB etching & cleaning
- metal surface treatment
- fertilizer production
Battery & Energy Storage
Packaging & Supply
Available Container Formats
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